Non-etching non-resist adhesion composition and method of preparing a work piece
AssigneeAtotech Deutschland GmbH
InventorsChristian Sparing, Dirk Tews, Norbert Luetzow, Martin Thoms
Life of this patent
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Abstract
To achieve good adherence of a resist coating, more specifically a photo imageable resist coating, to a copper base while ensuring that the copper base being very thin is not compromised, a non-etching non-resist composition for the treatment of the copper base is provided, said composition comprising at least one adhesion agent selected from the group comprising (i) heterocyclic compounds comprising at least one thiol moiety and (ii) quaternary ammonium polymers having the following general chemical formula: {N+(R3)(R4)—(CH2)a—N(H)—C(Y)—N(H)—(CH2)b—N+(R3)(R4)—R5}n 2n X−, with R1, R2, R3, R4, R5, Y and X− being defined as claimed.
Claims12
A non-etching non-resist composition for the treatment of copper or copper alloys, the composition consisting essentially of:
- at least one mineral acid or at least one organic acid, wherein said at least one mineral acid is selected from the group consisting of sulfuric acid and phosphoric acid;
- at least one solvent selected from the group consisting of water and an organic solvent;
- at least one adhesion agent selected from the group consisting of:
- a) heterocyclic compounds comprising at least one thiol moiety, said compounds being selected from the group consisting of compounds having at least one of formulae IIIA and IIIB:
- wherein
- R6 and R7 are independently selected from the group comprising H, SR9, OR9, NR10R11 and C1-C4 alkyl;
- R8 is H or C1-C3 alkyl;
- R9 is selected from the group comprising H, Li, Na, K and NH4;
- R10 and R11 are independently selected from the group comprising H, CH3 and C2H5;
- with the proviso that at least one of R6 and R7 is SR9;
- and
- b) quaternary ammonium polymers having general chemical formula II:
- {N+(R3)(R4)—(CH2)a—N(H)—C(Y)—N(H)—(CH2)b—N+(R3)(R4)—R5}n2nX− II
- wherein:
- R3 and R4 are independently methyl, ethyl, isopropyl, hydroxymethyl, hydroxyethyl or —CH2CH2(OCH2CH2)cOH;
- R5 is (CH2)d or {(CH2)eO(CH2)f]g;
- Y is O, S or NH;
- a, b, c, d, e and f are each independently an integer from 1 to about 6;
- g is an integer from 1 to about 4;
- n is an integer being at least 1;
- and
- X− is a halide ion, and
- wherein the composition is free of an oxidant for the copper or the copper alloys and wherein the composition is non-etching under conditions of conventional dip-tank techniques.
Dependencies are inferred from the claim text.