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US 8,945,297 B2Granted
Dielectric protective layer for a self-organizing monolayer (SAM)
AssigneeSiemens Aktiengesellschaft
InventorsTarik Cheema, Georg Garnweitner, Günter Schmid, Dan Taroata
Life of this patent
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Abstract
A dielectric protective layer has nanoparticles integrated therein to increase the dielectric constants. The nanoparticles are surrounded by a protective shell to prevent agglomeration, in order to maintain the small particle size, for depositing an extra-thin film.
Claims10
A protected device comprising:
- a self-assembling monolayer (SAM);
- a protective layer for the self-assembling monolayer, the protective layer comprising oxidic nanoparticles having a high dielectric constant, the oxidic nanoparticles having an average particle size of less than 50 nm, the oxidic nanoparticles having a protective shell which stabilizes the oxidic nanoparticles against agglomeration and aggregation;
- and
- a counter electrode provided on the protective layer.
1 more element
Dependencies are inferred from the claim text.