Splashguard for high flow vacuum bubbler vessel
AssigneeAir Products and Chemicals, Inc.
InventorsCharles Michael Birtcher, Thomas Andrew Steidl
Life of this patent
Estimating the term…
Abstract
The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.
Claims11
A container having a diptube inlet ending proximate a base of the container;
- at least one baffle disc, configured as a shallow downwardly open cone, positioned between the outlet of the diptube and an outlet of the container, configured to provide a narrow annular space between the baffle disc and an inner surface of a sidewall of the container;
- an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc;
- the baffle disc and deflector ledge capable of minimizing liquid droplets from entering the outlet to the container, a shoulder having an annular radially inward projecting edge spaced axially below the innermost edge of the deflector ledge, and a level sensor which ends near the base of the container capable of having a liquid surface level above the end of the level sensor.
A cylindrical vapor generation container having a diptube inlet capable of delivering a carrier gas into the container;
- a baffle disc having a circular and concave downward shape, positioned between an outlet end of the diptube inlet and an outlet of the container configured to provide a narrow annular space between an outermost circumferential perimeter edge of the baffle disc and an inner surface of a sidewall of the container;
- an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc, wherein the deflector ledge has an innermost edge that is radially inward of the outermost circumferential perimeter edge of the baffle disc;
- capable of minimizing liquid droplets from entering the outlet to the container when the carrier gas is bubbled through a liquid content of the container to dispense the liquid as a vapor from the container, a shoulder having an annular radially inward projecting edge spaced axially below the innermost edge of the deflector ledge, and a level sensor which ends near the base of the container capable of having a liquid surface level above the end of the level sensor.
A liquid dispense container having at least one baffle disc, configured as a shallow downwardly open cone, positioned between the inlet end of the diptube outlet and the inlet of the liquid dispense container, configured to provide a narrow annular space between the baffle disc and the inner surface of a sidewall of the container;
- an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc;
- wherein the deflector ledge has an innermost edge that is radially inward of an outermost edge of the baffle disc, capable of minimizing liquid droplets from entering the inlet to the liquid dispense container, a shoulder having an annular radially inward projecting edge spaced axially below the innermost edge of the deflector ledge, and a level sensor which ends near the base of the container capable of having a liquid surface level above the end of the level sensor.
Dependencies are inferred from the claim text.