Film deposition apparatus, cleaning method for the same, and computer storage medium storing program

A film deposition apparatus comprising:

• a susceptor rotatably provided in a chamber;
• a substrate receiving portion that is provided in one surface of the susceptor and in which a substrate is placed;
• a reaction gas supplying member configured to supply a reaction gas to the one surface of the susceptor;
• a cleaning member including:
• a first concave member that has an inverted concave shape and is provided above the susceptor and open toward the one surface, thereby defining a space of an inverted concavity, the first concave member extending substantially along a radius direction of the susceptor,
• a second concave member that is provided over the first concave member in order to define a gas passage between the first concave member and the second concave member, the gas passage extending substantially along the radius direction of the susceptor,
• a cleaning gas supplying portion configured to supply a cleaning gas to the space defined by the first concave member and extending in the radius direction so as to be parallel with the first and second concave members and covered at upper and lateral sides thereof by the first and second concave members, said gas supplying portion including first and second gas nozzles, each of the first and second gas nozzles having a plurality of holes for supplying the cleaning gas, said holes of the first gas nozzle being located so as to face the holes of the second gas nozzle, and
• an evacuation pipe configured to be in gaseous communication with the gas passage and to extend out from the chamber;
• and
• an evacuation opening provided in the chamber in order to evacuate the chamber,
• wherein the first concave member has a first opening end portion and the second concave member has a second opening end portion, said first and second opening end portions being arranged to define an opening end that directly faces the one surface of the susceptor for sucking the gas to be evacuated through the evacuation pipe and the evacuation opening, and the opening end extends substantially along the radius direction of the susceptor.