Back to results
US 8,943,883 B2Granted
Apparatus for counting microparticles using a gas reservoir to increase stability of air pressure
AssigneeHGST Netherlands B.V.
InventorMasakazu Okamura
Life of this patent
Estimating the term…
Abstract
A microparticle count apparatus that includes or is connected to a gas reservoir for increasing stability of air pressure at the microparticle counter even when air pressure or air flow rate provided by a nozzle coupled to the microparticle measurement apparatus is unstable.
Claims23
A microparticle measurement apparatus, wherein the apparatus comprises:
- a microparticle counter for counting a number of microparticles in a volume of gas received by the microparticle counter;
- a vacuum pump for causing the volume of gas to flow through the microparticle counter using negative pressure;
- and
- a gas reservoir for increasing stability of air pressure at the microparticle counter even when air pressure or air flow rate provided by a nozzle coupled to the microparticle measurement apparatus is unstable.
1 more element
A microparticle measurement apparatus, wherein the apparatus comprises:
- a microparticle counter for counting a number of microparticles in a volume of gas received by the microparticle counter;
- an external fitting for coupling with a vacuum pump, which is external to the microparticle measurement apparatus, for causing the volume of gas to flow through the microparticle counter using negative pressure;
- and
- a gas reservoir for increasing stability of air pressure at the microparticle counter even when air pressure or air flow rate provided by a nozzle coupled to the microparticle measurement apparatus is unstable.
1 more element
A microparticle measurement apparatus, wherein the apparatus comprises:
- a microparticle counter for counting a number of microparticles in a volume of gas received by the microparticle counter;
- a vacuum pump for causing the volume of gas to flow through the microparticle counter using negative pressure;
- and
- an external fitting for coupling with a gas reservoir for increasing stability of air pressure at the microparticle counter even when air pressure or air flow rate provided by a nozzle coupled to the microparticle measurement apparatus is unstable.
1 more element
Dependencies are inferred from the claim text.