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US 8,943,669 B2Granted
Assembly method for vacuum processing apparatus
AssigneeTokyo Electron Limited
InventorKoichi Shimada
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AssigneeTokyo Electron Limited
InventorKoichi Shimada
Estimating the term…
The disclosure provides an assembly method of a vacuum processing apparatus having a reaction vessel and an exhaust port that are made of quartz and airtightly connected to each other, in order to prevent breakage of the vessel. The method includes (a) mounting an attachment member on one end portion of the reaction vessel, (b) connecting and fixing at least a flange portion of an exhaust pipe to the exhaust port, (c) fixing the attachment member to a portion of the exhaust pipe including at least the flange portion connected and fixed to the exhaust port by using fixing members after (a) and (b), (d) fixing the attachment member to a support portion after (a), and (e) fixing the exhaust pipe to an exhaust pipe fixing portion different from the attachment member at a lower position than a fixing position of the attachment member after completing (a) to (d).
An assembly method of a vacuum processing apparatus which performs a vacuum process on a substrate in a depressurized atmosphere in a reaction vessel being made of quartz and having one end portion open as a loading port of the substrate and an exhaust port formed at said one end portion, the method comprising:
An assembly method of a vacuum processing apparatus which performs a vacuum process on a substrate in a depressurized atmosphere in a reaction vessel being made of quartz and having one end portion open as a loading port of the substrate and an exhaust port formed at said one end portion, the method comprising:
Dependencies are inferred from the claim text.