Optical waveguide board having guided structure and method of manufacturing the same, and method of manufacturing optical-electrical hybrid board

A method of manufacturing an optical waveguide board, the method comprising:

• a step of preparing a board;
• a step of forming a first clad layer on the board;
• a step of providing a first core member made of a photosensitive polymer material on the first clad layer;
• a step of working the first core member, and forming simultaneously a mirror pattern for forming a mirror part that converts a pathway of light input and output from above the board into a direction parallel to the board, and at least two guiding patterns having convex shapes on the first clad layer;
• a step of working one side surface of the mirror pattern into a tapered shape, and forming the mirror pattern having a tapered part;
• a step of forming a metal film on a surface of the mirror pattern including the tapered part exposed through a second opening part using a mask member retaining a first opening part provided to mate with the guiding patterns and the second opening part provided to make at least the tapered part of the mirror pattern exposed in a state that the guiding patterns and the first opening part are guided by mating;
• a step of providing a second core member made of a photosensitive polymer material with a refractive index higher than that of a material configuring the first clad layer on a surface including the first clad layer, the mirror pattern, and the guiding patterns;
• a step of working the second core member using a mask member for core pattern formation in a state that the guiding patterns and the mask member for core pattern formation are guided, and forming a wiring core adjacent to an end of the mirror pattern on the first clad layer;
• and
• a step of forming a second clad layer to cover the first clad layer and the wiring core, and forming an optical waveguide layer made of the first and second clad layers and the wiring core surrounded thereby.