Back to results
US 8,942,449 B2Granted
Calibration of a probe in ptychography
AssigneePhase Focus Limited
InventorAndrew Maiden
Life of this patent
Estimating the term…
Abstract
A method of providing image data for constructing an image of a region of a target object, comprising providing a reference diffraction pattern of a reference target object; determining an initial guess for a probe function based upon the reference diffraction pattern; and determining, by an iterative process based on the initial guess for the probe function and an initial guess for an object function, image data for a target object responsive to an intensity of radiation detected by at least one detector.
Claims20
A method of providing image data for constructing an image of a region of a target object, comprising:
- providing a reference diffraction pattern of a reference target object;
- determining an initial guess for a probe function based upon the reference diffraction pattern;
- and
- determining, by an iterative process based on the initial guess for the probe function and an initial guess for an object function, image data for a target object responsive to an intensity of radiation detected by at least one detector.
1 more element
Dependencies are inferred from the claim text.