Method of producing optical element and optical element
AssigneeCanon Kabushiki Kaisha
InventorsKazuhiro Arai, Jun-ichi Sakamoto, Junji Terada, Noriyuki Nakai
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Abstract
Provided are an optical element and a method of producing an optical element in which sufficient adhesion with an upper layer can be secured without damaging spectral characteristics. The production method includes the step of forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged, the step of forming an etching stopper layer on an upper part of the structural part, and the step of forming a second structural body on the etching stopper layer by etching.
Claims7
A method of producing an optical element comprising a first structural body and a second structural body on a base, the method comprising the steps of:
- forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged;
- forming an etching stopper layer on an upper part of the structural part;
- covering the structural part and the etching stopper layer with a covering material;
- polishing the covering material to thereby form a planarizing part on the etching stopper layer;
- and
- forming a second structural body on the planarizing part by etching.
Dependencies are inferred from the claim text.