Semiconductor inspection method and semiconductor inspection apparatus
AssigneesDainippon Screen Mfg. Co., Ltd., Osaka University
InventorsHidetoshi Nakanishi, Masayoshi Tonouchi
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Abstract
A semiconductor inspection apparatus (100) is an apparatus for inspecting a semiconductor device. The semiconductor inspection apparatus (100) includes a pulsed laser light source (14) for emitting pulsed laser light (2) toward a substrate (1) with a semiconductor device formed thereon, an electromagnetic wave pulse application part (18) for applying a reverses-biasing electromagnetic wave pulse (4) for applying a reverse bias to an application position (10) which receives the pulsed laser light (2), and a detection part (17) for detecting an electromagnetic wave pulse (3) emitted from the application position (10) in response to the application of the pulsed laser light (2).
Claims6
A semiconductor inspection apparatus for inspecting a semiconductor device, comprising:
- a first irradiation part for applying pulsed laser light to a semiconductor device;
- a second irradiation part for applying a reverse-biasing electromagnetic wave pulse for applying a reverse bias to an irradiation position which receives said pulsed laser light;
- and
- a detection part for detecting an electromagnetic wave pulse emitted from said irradiation position in response to the irradiation of said pulsed laser light,
- wherein said reverse-biasing electromagnetic wave pulse is a terahertz wave pulse.
A method of inspecting a semiconductor device, comprising the steps of:
- (a) irradiating pulsed laser light having a desired wavelength to a semiconductor device;
- (b) irradiating a reverse-biasing electromagnetic wave pulse to apply a reverse bias to an irradiation position which receives said pulsed laser light in said step (a);
- and
- (c) detecting an electromagnetic wave pulse emitted from said irradiation position in response to the application of said pulsed laser light,
- wherein said reverse-biasing electromagnetic wave pulse is a terahertz wave pulse.
Dependencies are inferred from the claim text.