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US 8,941,823 B2Granted
Surface inspection device for cylindrical body
AssigneeShowa Denko K.K.
InventorsKatsunori Wakatake, Hiroyasu Takahashi
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AssigneeShowa Denko K.K.
InventorsKatsunori Wakatake, Hiroyasu Takahashi
Estimating the term…
A surface inspection device for a cylindrical body includes an illumination light source disposed above the cylindrical body, a beam splitter disposed above the cylindrical body so as to correspond to the illumination light source, and a surface condition recognition device disposed above the beam splitter. Illumination light emitted from the illumination light source is reflected by the beam splitter and applied coaxially to the surface of the cylindrical body, and the reflected light reflected by the surface of the cylindrical body transmits through the beam splitter to be recognized by the surface condition recognition device. The device is configured such that the illumination light from the illumination light source is applied from one end side of the cylindrical body in the axial direction toward, the other end side so as to be in parallel to the axial direction.
A surface inspection device for a cylindrical body provided with an illumination light source disposed above the cylindrical body, a beam splitter disposed above the cylindrical body so as to correspond to the illumination light source, and a surface condition recognition device disposed above the beam splitter, wherein illumination light emitted from the illumination light source is reflected by the beam splitter and applied coaxially to a surface of the cylindrical body, reflected light reflected by the surface of the cylindrical body transmits through the beam splitter to be recognized by the surface condition recognition device, and the beam splitter is arranged to extend along an entire longitudinal length of the cylindrical body, wherein
A surface inspection method for a cylindrical body in which illumination light emitted from an illumination light source is reflected by a beam splitter and applied coaxially to a surface of the cylindrical body, reflected light reflected by the surface of the cylindrical body transmits through the beam splitter to be recognized by a surface condition recognition device, and the beam splitter is arranged to extend along an entire longitudinal length of the cylindrical body,
A coaxial epi-illumination device used for a surface inspection device for a cylindrical body for inspecting a surface condition of the cylindrical body on the reflected light reflected by a surface of the cylindrical body, comprising:
Dependencies are inferred from the claim text.