Multiple-blade holding devices
AssigneeNikon Corporation
InventorsDouglas C. Watson, Fardad Hashemi, Christopher S. Margeson
Life of this patent
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Abstract
An exemplary device includes first and second portions that are movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region. When the overlap region is compressed, displacement of the first and second portions relative to each other is prevented so as to provide relatively high stiffness in first and second orthogonal directions (e.g., z- and y-directions) and relatively low stiffness in a third orthogonal direction (e.g., x-direction). The device can be used in coordination with an actuator, wherein operation of the actuator and compression of the overlap region are automated.
Claims38
A device, comprising first and second portions movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region that, when compressed, inhibits displacement of the first and second sets relative to each other to provide a first stiffness in first and second orthogonal directions and a second stiffness in a third orthogonal direction, wherein the first stiffness is greater than the second stiffness.
A device, comprising:
- a holding device for placement between a first mass and a second mass, the holding device comprising first and second portions movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region that, when compressed, inhibits displacement of the first and second sets relative to each other;
- a compression device operable to apply a compression force to the overlap region;
- and
- an actuator connected to one of the first and second masses, the actuator being operable to apply a displacement force urging movement of at least one of the first and second masses relative to the other mass.
An assembly, comprising:
- a first mass that is movable relative to a second mass;
- and
- at least one coupling extending between the first and second masses;
- each coupling comprising a respective holding device comprising first and second portions coupled to the first and second masses, respectively, the first and second portions being movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region that, when compressed, inhibits displacement of the first and second sets relative to each other to provide respective support of a respective portion of the first mass having a first stiffness in first and second orthogonal directions and a second stiffness in a third orthogonal direction, wherein the first stiffness is greater than the second stiffness.
A stage assembly, comprising:
- a base;
- a table that is displaceable relative to the base;
- at least one coupling extending between the table and base;
- and
- at least one coupling comprising a respective holding device comprising first and second portions coupled to the table and base, respectively, the first and second portions being movably connected together by first and second sets, respectively, of multiple blades interleaved with each other at an overlap region that, when compressed, inhibits displacement of the first and second sets relative to each other to provide respective support of a respective portion of the table, the support having a first stiffness in first and second orthogonal directions and a second stiffness in a third orthogonal direction, wherein the first stiffness is greater than the second stiffness.
An assembly, comprising:
- a first mass;
- a second mass;
- and
- at least one holding device mounted to the first and second masses and extending between the first and second masses, the holding device comprising a first set of multiple blades, a second set of multiple parallel blades interleaved with the first set of blades at an overlap region, and a compression device, situated at the overlap region and configured to apply, in a selectable manner, a clamping force to the overlap region, the first set of blades being mounted to the first mass, and the second set of blades being mounted to the second mass.
Dependencies are inferred from the claim text.