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US 8,941,403 B2Granted
Semiconductor device and method of testing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJinman Chang, Kyounghyun Kim
Life of this patent
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Abstract
A semiconductor device includes a unit region including a circuit test region and a probe test region. The circuit test region includes a test circuit and a plurality of circuit test pads operatively coupled to the test circuit. The probe test region includes first and second probe test pads insulated from the circuit test pads, and a first resistance pattern operatively coupled to the first and second probe test pads.
Claims10
A semiconductor device, comprising:
- a unit region comprising a circuit test region and a probe test region;
- a test circuit and a plurality of circuit test pads disposed in the circuit test region, wherein the circuit test pads are operatively coupled to the test circuit;
- and
- a first probe test pad, a second probe test pad, and a first resistance pattern disposed in the probe test region, wherein the first and second probe test pads are insulated from the circuit test pads, and the first resistance pattern is operatively coupled to the first and second probe test pads.
1 more element
Dependencies are inferred from the claim text.