Light-emitting element, light-emitting device, electronic device, and method for fabricating light-emitting element

A method of fabricating a light-emitting element, comprising the steps of:

• forming a first electrode;
• forming an EL layer over the first electrode;
• forming a second electrode over the EL layer;
• forming a layer containing an organic compound and an inorganic compound over the second electrode;
• adding halogen atoms to the layer containing the organic compound and the inorganic compound by ion implantation, thereby forming a first sealing layer containing the organic compound, the inorganic compound, and the halogen atoms over the second electrode;
• and
• forming a second sealing layer over the first sealing layer by one of a plasma CVD method, a sputtering method, and a vacuum evaporation method.

A light-emitting device comprising:

• a wiring over a first substrate;
• a first electrode over the first substrate;
• an insulator over the first electrode;
• an EL layer over the insulator;
• a second electrode over the EL layer;
• a first sealing layer comprising an organic compound over the second electrode;
• a sealing material over and in contact with the wiring;
• and
• a second substrate attached to the first substrate by the sealing material,
• wherein the first sealing layer covers the insulator and the second electrode, and
• wherein the organic compound is capable of being used for a composite material which can be used for the EL layer.