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US 8,941,238 B2Granted
Semiconductor device
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorNobuo Aoi
Life of this patent
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Abstract
A semiconductor device includes a first substrate; a plurality of first electrodes formed on the first substrate; and a first insulating film formed on sidewalls of the plurality of first electrodes. The first insulating film is formed not to fill spaces between the plurality of first electrodes.
Claims15
A semiconductor device, comprising:
- a first substrate;
- a plurality of first electrodes formed on the first substrate;
- and
- a first insulating film formed on sidewalls of each of the plurality of first electrodes,
- a second substrate;
- a plurality of second electrodes formed on the second substrate in positions corresponding to the plurality of first electrodes on the first substrate;
- and
- a second insulating film formed on sidewalls of each of the plurality of second electrodes, wherein
- the first insulating film is formed not to fill spaces between adjacent ones of the plurality of first electrodes,
- the second insulating film is formed not to fill spaces between adjacent ones of the plurality of second electrodes,
- the first substrate and the second substrate are arranged so that the plurality of first electrodes face the corresponding plurality of second electrodes,
- the plurality of first electrodes are bonded to the corresponding plurality of second electrodes, and
- the first insulating film formed on the sidewalls of each of the plurality of first electrodes is in contact with the second insulating film formed on the sidewalls of each of the plurality of second electrodes.
10 more elements
The semiconductor device of claim wherein the barrier layer contains titanium.
Dependencies are inferred from the claim text.