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US 8,941,223 B2Granted
MEMS device package with conductive shell
AssigneeInvenSense, Inc.
InventorThomas M. Goida
Life of this patent
Estimating the term…
Abstract
A MEMS lead frame package body encloses a MEMS device enclosed in an internal cavity formed by the mold body and cover. A conductive internal shell with a connection window sits in the cavity. The MEMS device is mounted in the shell and electrically coupled to the lead frame through wire bonds directed through the connection window. To accommodate a MEMS microphone, an acoustic aperture extends through the mold body aligned with a hole in the internal shell.
Claims11
A package for a MEMS device, the package comprising:
- a lead frame comprising a plurality of internal bond pads;
- a mold body partially encapsulating the lead frame, the mold body forming a cavity and a bottom surface, the mold body partially encapsulating the lead frame, such that the plurality of internal bond pads are exposed within the cavity;
- a conductive shell having a connection window, the conductive shell electrically coupled to the lead frame and residing within the cavity such that the connection window aligns with the plurality of internal bond pads;
- a MEMS device mounted to the conductive shell, and electrically coupled to the plurality of internal bond pads through a plurality of wire bonds;
- and
- a conductive cover, the conductive cover physically and electrically coupled to the conductive shell and completely covering the cavity, the conductive cover and the conductive shell form an enclosed chamber within the package, the MEMS device contained within the enclosed chamber.
3 more elements
Dependencies are inferred from the claim text.