Color filter including clear pixel and hard mask
AssigneeOmniVision Technologies, Inc.
InventorsGang Chen, Duli Mao, Hsin-Chih Tai, Howard E. Rhodes
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Abstract
Embodiments of an apparatus including a color filter arrangement formed on a substrate having a pixel array formed therein. The color filter arrangement includes a clear filter having a first clear hard mask layer and a second clear hard mask layer formed thereon, a first color filter having the first clear hard mask layer and the second hard mask layer formed thereon, a second color filter having the first clear hard mask layer formed thereon, and a third color filter having no clear hard mask layer formed thereon. Other embodiments are disclosed and claimed.
Claims8
A process for forming a color filter arrangement, the process comprising:
- depositing a clear layer over a surface of a substrate, the substrate having a pixel array formed therein;
- patterning and etching the clear layer to form a first opening;
- depositing a first color filter material in the first opening;
- depositing a first clear hard mask layer over the clear layer and the first color filter material;
- patterning and etching the first clear hard mask layer and the clear layer to form a second opening;
- depositing a second color filter material in the second opening;
- depositing a second clear hard mask layer over the first clear hard mask layer and the second color filter material;
- patterning and etching the second clear hard mask layer, the first clear hard mask layer, and the clear layer to form a third opening;
- and
- depositing a third color filter material in the third opening.
Dependencies are inferred from the claim text.