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US 8,941,085 B2Granted
Electron beam lithography systems and methods including time division multiplex loading
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMing-Zhang Kuo, Ping-Lin Yang, Cheng-Chung Lin, Osamu Takahashi, Sang Hoo Dhong
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Abstract
The present disclosure provides a systems and methods for e-beam lithography. One system includes an electron source operable to produce a beam and an array of pixels operable to pattern the beam. Control circuitry is spaced a distance from and coupled to the array of pixels. The control circuitry uses time domain multiplex loading (TMDL) to control the array of pixels.
Claims18
A system, comprising:
- an electron source operable to produce a beam;
- an array of pixels operable to pattern the beam;
- and
- control circuitry spaced a distance from and coupled to the array of pixels, wherein the control circuitry uses time domain multiplex loading to control the array of pixels;
- wherein the control circuitry includes:
- a multiplexer;
- a first data path coupled to the multiplexer and to a first pixel and a second pixel of the array of pixels;
- and
- a first clock signal provided to a demultiplexer (demux), wherein the demux uses the first clock signal to generate a second clock signal provided to the first pixel and a third clock signal provided to the second pixel.
6 more elements
A system, comprising:
- an electron source operable to produce a beam;
- an array of pixels operable to pattern the beam;
- and
- control circuitry spaced a distance from and coupled to the array of pixels, wherein the control circuitry uses time domain multiplex loading to control the array of pixels and wherein the control circuitry includes:
- a first clock signal provided to a demultiplexer (demux), wherein the demux generates a plurality of clock signals used to provide data to the array of pixels.
2 more elements
An electron beam (e-beam) lithography tool, comprising:
- a pattern generator device, including:
- a first pixel and a second pixel, wherein each of the first pixel and the second pixel share a single data path;
- a peripheral region having control circuitry for the first pixel and the second pixel, wherein the control circuitry comprises a demultiplexer receiving a first clock signal;
- and
- the single data path providing data from the control circuitry to the first and the second pixels.
2 more elements
Dependencies are inferred from the claim text.