Deceleration apparatus for ribbon and spot beams
AssigneeAdvanced Ion Beam Technology, Inc.
InventorsNicholas White, Zhimin Wan, Erik Collart
Life of this patent
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Abstract
A deceleration apparatus capable of decelerating a short spot beam or a tall ribbon beam is disclosed. In either case, effects tending to degrade the shape of the beam profile are controlled. Caps to shield the ion beam from external potentials are provided. Electrodes whose position and potentials are adjustable are provided, on opposite sides of the beam, to ensure that the shape of the decelerating and deflecting electric fields does not significantly deviate from the optimum shape, even in the presence of the significant space-charge of high current low-energy beams of heavy ions.
Claims14
An electrode assembly for accelerating or decelerating an ion beam, the ion beam entering the electrode assembly at an initial beam direction and following an ion beam path through the electrode assembly, the electrode assembly comprising:
- a first set of electrodes configured to electrostatically deflect the ion beam a first amount with respect to a plane aligned with the initial beam direction and a dimension of a cross-section of the ion beam, the first set of electrodes comprising:
- a first pair of deflecting electrodes positioned parallel to the dimension of the cross-section of the ion beam;
- and
- a first set of electrode caps attached to opposite ends of each deflecting electrode of the first pair of deflecting electrodes, wherein the first set of electrode caps are positioned orthogonal to the dimension of the cross-section of the ion beam, and wherein the first set of electrode caps at least partially extend towards a centerline between the first pair of deflecting electrodes to shield a region between the first pair of deflecting electrodes from surrounding electric fields;
- and
- a second set of electrodes configured to electrostatically deflect the ion beam a second amount with respect to the plane, the second set of electrodes comprising:
- a second pair of deflecting electrodes positioned parallel to the dimension of the cross-section of the ion beam;
- and
- a second set of electrode caps attached to opposite ends of each deflecting electrode of the second pair of deflecting electrodes, wherein the second set of electrode caps are positioned orthogonal to the dimension of the cross-section of the ion beam, and wherein the second set of electrode caps at least partially extend towards a centerline between the second pair of deflecting electrodes to shield a region between the second pair of deflecting electrodes from surrounding electric fields.
Dependencies are inferred from the claim text.