Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method

A thermal detector manufacturing method comprising:

• forming a structure including an insulating layer on a surface of a substrate;
• forming a sacrificial layer on the structure including the insulating layer;
• forming a support member on the sacrificial layer;
• forming a heat-detecting element on the support member;
• forming a light-reflecting layer on the support member at a position spaced apart from the heat-detecting element in at least a portion of a peripheral region of the heat-detecting element;
• forming a first light-absorbing layer so as to cover the heat-detecting element and the light-reflecting layer, and planarizing the first light-absorbing layer;
• forming a contact hole in a portion of the first light-absorbing layer, subsequently forming a material layer which is thermally conductive and optically transmissive at least with respect to light of a prescribed wavelength, and patterning the material layer to form a thermal transfer member having a connecting portion that connects to the heat-detecting element and a thermal collecting portion having a surface area greater than that of the connecting portion as seen in plan view;
• forming a second light-absorbing layer on the first light-absorbing layer;
• patterning the first light-absorbing layer and the second light-absorbing layer;
• patterning the support member;
• and
• removing the sacrificial layer to form a cavity between the support member and the structure including the insulating layer formed on the surface of the substrate.