Readout methodology for multi-channel acquisition of spatially distributed signal
AssigneeKLA-Tencor Corporation
InventorsGabor Toth, Stuart Friedman, Khashayar Shadman
Life of this patent
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Abstract
A readout apparatus and method for processing spatially distributed signals is disclosed. The readout apparatus and method may reduce/eliminate the impact gain variations among a plurality of sensing channels. This is done by continuously varying the dispersion properties of a signal distribution device, which may induce a spatial shift of the signal distribution during data acquisition, allowing the distributed signals to move across the sensor area. Shifting of the distributed signals may occur multiple times, hence eliminating the impact of gain variation across the sensor array. The accumulated data may be re-assembled subsequently to complete the readout operation.
Claims20
An apparatus for processing an input signal, the apparatus comprising:
- a signal distribution device configured for receiving the input signal and spatially distributing the input signal as a plurality of distributed signals, the signal distribution device further configured for changing the spatial distribution of the plurality of distributed signals according to a deterministic distribution function when time advances from one time instance to a next time instance;
- a sensor array configured for receiving at least a subset of the plurality of distributed signals at each time instance, the sensor array further configured for converting the received distributed signals to electrical signals for each time instance;
- and
- a signal processor communicatively connected to the sensor array, the signal processor configured for receiving the electrical signals for each time instance, the signal processor further configured for determining an intensity value of at least one of the plurality of distributed signals based on the electrical signals received from the sensor array and the deterministic distribution function utilized for spatial distribution for different time instances.
A method for processing an input signal, the method comprising:
- separating the input signal into a plurality of separated signals;
- spatially distributing the plurality of separated signals as a first spectrum of signals at a first time instance;
- converting at least a subset of the first spectrum of signals to electrical signals for the first time instance;
- spatially distributing the plurality of separated signals as a second spectrum of signals at a second time instance, the second spectrum of signals being shifted from the first spectrum of signals;
- converting at least a subset of the second spectrum of signals to electrical signals for the second time instance;
- and
- determining an intensity value for at least one of the plurality of separated signals based on the electrical signals obtained for the first time instance and the electrical signals obtained for the second time instance.
An apparatus for reading an optical signal, the apparatus comprising:
- a spectrometer configured for receiving the optical signal and spatially distributing the optical signal as a plurality of distributed electrons, the spectrometer further configured for changing the spatial distribution of the plurality of distributed electrons according to a deterministic distribution function when time advances from one time instance to a next time instance;
- a sensor array configured for receiving at least a subset of the plurality of distributed electrons at each time instance, the sensor array further configured for converting the received distributed electrons to electrical signals for each time instance;
- and
- a signal processor communicatively connected to the sensor array, the signal processor configured for receiving the electrical signals for each time instance, the signal processor further configured for determining an intensity value of at least one of the plurality of distributed electrons based on the electrical signals received from the sensor array and the deterministic distribution function utilized for spatial distribution for different time instances.
Dependencies are inferred from the claim text.