Free-standing metallic article for semiconductors
AssigneeGTAT Corporation
InventorsSteve Babayan, Robert Brainard, Arvind Chari, Alejandro de la Fuente Vornbrock, Venkatesan Murali, Gopal Prabhu, Venkateswaran Subbaraman, Dong Xu, Arthur Rudin, David Tanner
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