Back to results
US 8,940,630 B2Granted
Method of making wire bond vias and microelectronic package having wire bond vias
AssigneeInvensas Corporation
InventorsPhilip Damberg, Zhijun Zhao, Ellis Chau
Life of this patent
Estimating the term…
Abstract
Microelectronic components and methods forming such microelectronic components are disclosed herein. The microelectronic components may include a plurality of electrically conductive vias in the form of wire bonds extending from a bonding surface of a substrate, such as surfaces of electrically conductive elements at a surface of the substrate.
Claims32
A method of forming a plurality of wire bonds connected to a substrate, comprising:
- (a) positioning at least one of:
- a bonding tool and a portion of a wire extending downward beyond a face thereof;
- or a forming surface relative to one another such that an end of the wire portion extending downward beyond a face of the bonding tool is positioned at a greater depth from the bonding tool face than the forming surface;
- (b) then moving the bonding tool along the first forming surface in a first direction parallel to the face of the bonding tool so as to bend the wire portion towards the bonding tool;
- (c) then moving the bonding tool in a second direction transverse to the bonding tool face such that an exposed wall of the bonding tool extending away from the bonding tool face confronts a second forming surface extending away from the first forming surface, whereby the wire portion is bent towards the exposed wall of the bonding tool;
- (d) coining a part of the wire portion between the bonding tool face and a coining surface;
- (e) using the bonding tool to bond the coined part of the wire portion to an electrically conductive bonding surface of the substrate to form a wire bond, while leaving unbonded the end of the wire portion remote from the coined part;
- and
- (f) repeating steps (a) through (e) to form a plurality of the wire bonds to at least one of the bonding surface.
6 more elements
Dependencies are inferred from the claim text.