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US 8,940,613 B2Granted
Organic light emitting diode display and method for manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorChi-Wook An
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Abstract
An organic light emitting diode display includes a substrate; a first capacitor electrode provided over the substrate and including polysilicon; an insulating layer provided over the first capacitor electrode; and a second capacitor electrode provided over the insulating layer and including a first lower metal layer overlapping with the first capacitor electrode and a first upper metal layer. The first upper metal layer includes a doping opening configured to expose at least a portion of the first lower metal layer.
Claims8
A method of manufacturing an organic light emitting diode display, comprising:
- forming a first silicon layer and a second silicon layer over a substrate;
- forming an insulating layer over the first silicon layer and the second silicon layer;
- forming a lower metal layer over the insulating layer and an upper metal layer over the lower metal layer;
- forming a photoresist pattern over the upper metal layer;
- dry-etching the upper metal layer by using the photoresist pattern to form a first upper metal portion and a second upper metal portion;
- wet-etching the lower metal layer using the photoresist pattern to form a first lower metal portion and a second lower metal portion;
- and
- doping conductive impurity ions to the first silicon layer and the second silicon layer to form a semiconductor comprising a source region, and a drain region, and a first capacitor electrode;
- wherein the first upper metal portion comprises a doping opening exposing the first lower metal portion, and wherein the conductive impurity ions are doped to the second silicon layer through the doping opening.
6 more elements
Dependencies are inferred from the claim text.