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US 8,940,570 B2Granted
Micro-electro-mechanical system (MEMS) structures and design structures
AssigneeInternational Business Machines Corporation
InventorsChristopher V. Jahnes, Anthony K. Stamper
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Abstract
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming at least one fixed electrode on a substrate. The method further includes forming a Micro-Electro-Mechanical System (MEMS) beam with a varying width dimension, as viewed from a top of the MEMS beam, over the at least one fixed electrode.
Claims21
A method comprising:
- forming at least one fixed electrode on a substrate;
- and
- forming a Micro-Electro-Mechanical System (MEMS) beam with a varying width dimension, as viewed from a top of the MEMS beam, over the at least one fixed electrode.
A method of forming a MEMS varactor, comprising:
- forming a fixed electrode layer on a substrate through deposition and patterning;
- forming a sacrificial material over the fixed electrode;
- layering metal and insulator materials over the sacrificial material;
- masking the layered metal and insulator materials with a varying width dimension;
- etching the layered metal and insulator materials to form a beam structure with a non-uniformed width dimension, the non-uniform width dimension includes a reduced area portion of an initial pull-in section of the beam;
- and
- forming a cavity about the beam through a venting process.
4 more elements
A method in a computer-aided design system for generating a functional design model of a MEMS structure, the method comprising:
- generating a functional representation of a fixed electrodes formed on a substrate;
- generating a functional representation of a composite beam structure having a varying width dimension with at least a first portion of a constant dimension and a second portion of a reduced width compared to the first portion, the second portion comprising an initial pull-in portion of the beam structure;
- and
- generating a functional representation of a cavity structure surrounding the beam structure.
1 more element
Dependencies are inferred from the claim text.