Apparatus and method for manufacturing composite nano particles

An apparatus for manufacturing composite nanoparticles, comprising:

• a first precursor supply unit vaporizing a first precursor and supplying it to a reaction unit;
• a second precursor supply unit vaporizing a second precursor and supplying it to the reaction unit;
• the reaction unit producing composite nanoparticles by reacting the vaporized first precursor with the vaporized second precursor;
• an oxygen supply line supplying an oxygen source to the reaction unit;
• and
• a collection unit collecting the composite nanoparticles produced by the reaction unit,
• wherein the reaction unit comprises:
• a U-shaped reaction chamber having:
• a first straight flow path wherein nanoparticles are produced from the vaporized first precursor supplied from the first precursor supply unit;
• a curved flow path which is communicated with the first straight flow path and allows the nanoparticles produced from the first straight flow path to be introduced to a second straight flow path with a curved flow;
• and the second straight flow path which is communicated with the curved flow path and wherein the composite nanoparticles are produced from the reaction of the nanoparticles of the first precursor introduced from the curved flow path and the vaporized second precursor supplied from the second precursor supply unit;
• a second precursor inflow path introducing the vaporized second precursor supplied from the second precursor supply unit to the second straight flow path of the U-shaped reaction chamber;
• and
• a heat supply means supplying heat to the U-shaped reaction chamber.