Method for treating spent abrasive slurry

A method for treating a spent abrasive slurry obtained from a process for cutting a body of a substrate material into wafer-like slices, said slurry comprising a lubricant fluid, unspent abrasive particles and fines, said method comprising separating the spent slurry in a first sedimentation step into a solids concentrate comprising unspent abrasive particles and a solids depleted slurry;

• and subsequently separating the solids depleted slurry by cross-flow filtration into a fines containing fraction and a solids and fines depleted regenerated lubricant fluid, wherein a portion of the regenerated lubricant fluid is passed through a heat exchanger to heat spent slurry, and wherein another portion of the regenerated lubricant fluid is recycled and admixed with spent slurry prior to subjecting the spent slurry to the first sedimentation step.