Vertical heat treatment apparatus

A vertical heat treatment apparatus which carries a substrate supporter supporting a plurality of substrates in the form of a shelf via supporting columns into a vertical reaction tube having a heater arranged around the vertical reaction tube and performs a film forming process for the substrates, comprising:

• a rotation mechanism which rotates the substrate supporter around an inclination axis inclined with respect to a vertical axis;
• a carrying arm which advances and retreats to load or unload the substrates onto or from the substrate supporter;
• a plurality of main holders which are provided at every reception position of the substrates in the substrate supporter and supports bottom peripheries of the substrates at positions separated from each other in a circumferential direction of the substrates;
• and
• at least one first auxiliary holder and at least one second auxiliary holder which are located to be separated from the main holders in the circumferential direction of the substrates and whose tops are lower than those of the plurality of main holders in a direction of the inclination axis,
• wherein the main holders are arranged to support a center portion of the substrates, the center portion configured equidistant from every point on the substrate between the first auxiliary holder and the second auxiliary holder, in a movement direction of the carrying arm and the first auxiliary holder and the second auxiliary holder are arranged at an advancing side and at a retreating side of the carrying arm with respect to the main holders, respectively, so that each of the substrates on the substrate supporter alternates between a position supported by the first auxiliary holder and the main holders and a position supported by the second auxiliary holder and the main holders every rotation of the substrate by means of the rotation mechanism.