Membrane assembly and carrier head having the membrane assembly
AssigneeK.C. Tech Co., Ltd.
InventorJun Ho Son
Life of this patent
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Abstract
Provided is a membrane assembly of a carrier head in a chemical-mechanical polishing apparatus. The membrane assembly includes a main membrane and a circular ring. The main membrane has a wafer contacting surface in contact with a wafer while a chemical-mechanical polishing process is being performed. The circular ring is disposed at an edge portion of the main membrane and receives an air pressure to downwardly apply the air pressure to the main membrane at the edge portion.
Claims10
A membrane assembly of a carrier head in a chemical-mechanical polishing apparatus, comprising:
- a main membrane having a wafer contacting surface in contact with a wafer, a wing portion that vertically extends an edge portion of the main membrane and an edge chamber extending from the wing portion;
- and
- a circular ring disposed at an edge portion of the main membrane, the circular ring having a hollow section which is formed to have an inclined surface inclined with respect to the wafer contacting surface of the main membrane,
- wherein the edge chamber applies pressure to the inclined surface of the circular ring and the circular ring applies pressure to the main membrane when air pressure is applied to the edge chamber.
A membrane assembly of a carrier head in a chemical-mechanical polishing apparatus, comprising:
- a main membrane having a wafer contacting surface in contact with a wafer, a wing portion that vertically extends from an edge portion of the main membrane and an edge chamber extending from the wing portion;
- a circular ring disposed at an edge portion of the main membrane, and
- a dividing membrane that has at least one partition for defining chambers and is disposed on a top surface of the main membrane,
- wherein the edge chamber applies pressure to the circular ring and the circular ring applies pressure to the main membrane when air pressure is applied to the edge chamber and wherein the main membrane comprises a location fixing protrusion formed at a location on the top surface thereof, corresponding to a central through hole of the dividing membrane.
Dependencies are inferred from the claim text.