Lens module comprising at least one exchangeable optical element
AssigneeCarl Zeiss SMT GmbH
InventorsGuido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle
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AssigneeCarl Zeiss SMT GmbH
InventorsGuido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle
Estimating the term…
An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. Alternatively or in addition, the optical system has a gas lock that receives the optical element. The opening interconnects the gas lock and the receiving region of the housing, and accommodates passage of the optical element between the gas lock and the receiving region.
An optical system, comprising:
An optical system, comprising:
An optical system, comprising:
A method, comprising:
An optical system for semiconductor lithography, comprising at least one optical element exchangeably arranged in a housing and at least one gas exchange device arranged in a region of the exchangeable optical element such that a receiving region for the exchangeable optical element is flushed during the exchange of the optical element.
Dependencies are inferred from the claim text.