Fluid ejection device

A fluid ejection device comprising:

• a flexible membrane supported by a substrate and over a fluid chamber;
• an adhesive layer on the flexible membrane, the adhesive layer comprising an edge region and a central region;
• a piezoelectric material layer comprising an edge region and a central region, the edge region having a beveled edge, a top surface of the edge region of the piezoelectric material layer coplanar with a top surface of the edge region of the adhesive layer;
• a first metal layer between the piezoelectric material layer and the adhesive layer such that a surface of the first metal layer is coplanar with the top surface of the edge region of the piezoelectric material layer and the top surface of the edge region of the adhesive layer;
• and
• a second metal layer over the top surface of the edge region of the piezoelectric material layer, the top surface of the edge region of the adhesive layer, the surface of the first metal layer, and the flexible membrane to electrically couple the first metal layer to a ground pad,
• wherein the top surface of the edge region of the adhesive layer and the top surface of the edge region of the piezoelectric material layer are substantially parallel to the flexible membrane.

A method for fabricating a fluid ejection device, the method comprising:

• providing a piezoelectric material layer;
• beveling an edge of the piezoelectric material layer;
• depositing a first electrically conductive layer over the piezoelectric material layer including over the beveled edge of the piezoelectric material layer;
• providing a flexible membrane;
• attaching the piezoelectric material layer to the flexible membrane via an adhesive layer such that the first electrically conductive layer faces the flexible membrane;
• trimming an edge region of the piezoelectric material layer and an edge region of the adhesive layer such that the beveled edge of the piezoelectric material layer is maintained and to expose the first electrically conductive layer at the beveled edge of the piezoelectric material layer between the edge region of the piezoelectric material layer and the edge region of the adhesive layer;
• depositing a second electrically conductive layer over the piezoelectric material layer, the first electrically conductive layer, the edge region of the adhesive layer, and the flexible membrane to electrically couple the first electrically conductive layer to a ground pad;
• and
• trimming the second electrically conductive layer to electrically isolate the second electrically conductive layer over a central region of the piezoelectric material layer from the second electrically conductive layer over the edge region of the piezoelectric material layer.