Liquid flow controller and precision dispense apparatus and system
AssigneeEntegris, Inc.
InventorsMarc Laverdiere, Robert F. McLoughlin, George Gonnella, Iraj Gashgaee, Jennifer Marrs
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AssigneeEntegris, Inc.
InventorsMarc Laverdiere, Robert F. McLoughlin, George Gonnella, Iraj Gashgaee, Jennifer Marrs
Estimating the term…
Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
An assembly, comprising
A valve with reduced hysteresis, comprising
Dependencies are inferred from the claim text.