Polycrystalline silicon portion and method for breaking a silicon body
AssigneeWacker Chemie AG
InventorsLaszlo Fabry, Peter Gruebl, Christian Huber
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AssigneeWacker Chemie AG
InventorsLaszlo Fabry, Peter Gruebl, Christian Huber
Estimating the term…
The invention relates to a polycrystalline silicon portion having at least one fracture surface or cut surface, which includes metal contamination of from 0.07 ng/cm2 to 1 ng/cm2. The invention also relates to a method for breaking a silicon body, preferably a rod of polycrystalline silicon, including the steps: a) determining the lowest natural bending frequency of the silicon body; b) exciting the silicon body in its lowest natural bending frequency by means of an oscillation generator, the excitation being carried out at an excitation point of the silicon body such that the silicon body breaks at the excitation point; so that a silicon portion having a fracture surface results which includes metal contamination of from 0.07 ng/cm2 to 1 ng/cm2.
A method for breaking a silicon body, which is a rod of polycrystalline silicon, comprising the steps:
Dependencies are inferred from the claim text.