Processing system

A processing system for processing an object, the processing system comprising:

• a first energy beam guiding system having first optics configured for generating a first energy beam and focusing the first energy beam in a focusing region located in a vacuum chamber;
• a second energy beam guiding system having second optics configured for generating a second energy beam and focusing the second energy beam in the focusing region;
• at least one processing chamber wall which has a recessed shape which opens toward a plane;
• wherein the processing chamber wall is arrangeable within the vacuum chamber such that the processing chamber wall at least partially encompasses the focusing region;
• wherein the processing chamber wall comprises a front face substantially disposed in the plane, wherein the front face surrounds a beam path of the first energy beam and a beam path of the second energy beam;
• wherein the processing chamber wall has at least one connector for supplying a process gas to the focusing region;
• wherein a first opening traversed by the beam path of the first energy beam is formed in the processing chamber wall, and wherein a second opening traversed by the beam path of the second energy beam is formed in the processing chamber wall, and wherein the second opening is spaced apart from the first opening;
• wherein the processing chamber wall comprises a first wall portion and a second wall portion being displaceable relative to each other;
• and
• wherein the first wall portion provides the first opening and the second opening, and wherein the second wall portion comprises at least a portion of the front face.

A processing system for processing an object, the processing system comprising:

• a first energy beam guiding system having first optics configured for generating a first energy beam and focusing the first energy beam in a focusing region located in a vacuum chamber;
• a second energy beam guiding system having second optics configured for generating a second energy beam and focusing the second energy beam in the focusing region;
• at least one processing chamber wall which is arrangeable within the vacuum chamber such that the processing chamber wall at least partially encompasses the focusing region;
• wherein the processing chamber wall comprises a front face substantially disposed in a plane, wherein the front face surrounds a beam path of the first energy beam and a beam path of the second energy beam;
• wherein the processing chamber wall has at least one connector for supplying a process gas to the focusing region;
• wherein a first opening traversed by the beam path of the first energy beam is formed in the processing chamber wall, and wherein a second opening traversed by the beam path of the second energy beam is formed in the processing chamber wall, and wherein the second opening is spaced apart from the first opening;
• wherein the processing chamber wall comprises a first wall portion and a second wall portion being displaceable relative to each other, wherein the first wall portion provides the first opening and the second opening, and wherein the second wall portion comprises at least a portion of the front face;
• and
• an object holder for holding the object, wherein the object holder is adapted to change an orientation of the object relative to the beam path of the first energy beam from a first orientation to a second orientation;
• wherein an angle between the first orientation and the second orientation is between 10° and 60°;
• wherein in the first and in the second orientation, at least one of the front face and a fitting plane of the front face substantially extends parallel to a surface of the object.