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US 8,939,029 B2Granted
MEMS sensor with movable Z-axis sensing element
AssigneeAnalog Devices, Inc.
InventorsXin Zhang, Michael W. Judy
Life of this patent
Estimating the term…
Abstract
A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure electrically coupled to the mass of the MEMS sensor. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
Claims18
A MEMS sensor comprising:
- a substrate;
- a MEMS structure coupled to the substrate and having a mass movable with respect to the substrate;
- and
- a reference structure electrically coupled to the movable mass of the MEMS structure, wherein the MEMS structure is radially outward from the reference structure.
1 more element
A method of producing a MEMS sensor, the method comprising:
- providing a substrate;
- forming a MEMS structure coupled to the substrate and having a mass movable with respect to the substrate;
- and
- forming a reference structure electrically coupled to the movable mass of the MEMS structure, wherein the MEMS structure is radially outward from the reference structure.
1 more element
A method of measuring motion in a z-axis using a MEMS sensor, the method comprising:
- providing a substrate having a z-plane MEMS electrode on the substrate;
- providing a MEMS structure substantially above the z-plane MEMS electrode, the MEMS structure coupled to the substrate and having a mass movable with respect to the substrate;
- providing a reference structure electrically coupled to the movable mass to form a sensing element;
- applying a potential to the z-plane MEMS electrode;
- and
- measuring a change in capacitance between the sensing element and the z-plane MEMS electrode using the sensing element, wherein the MEMS structure is radially outward from the reference structure.
3 more elements
Dependencies are inferred from the claim text.