US 8,939,027 B2Granted

Acceleration sensor

AssigneeSeiko Epson Corporation

InventorsJun Watanabe, Kazuyuki Nakasendo, Takahiro Kameta

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Abstract

An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.

Claims11

Dependent claims

Acceleration sensor comprising:

a support substrate including a fixed first substrate piece having a first support surface, a movable second substrate piece disposed next to the first substrate piece, having a second support surface, and having a width along the direction in which the first and second substrate pieces are disposed side by side being smaller than a width along the direction perpendicular to the side-by-side direction, and a hinge disposed between the first substrate piece and the second substrate piece and connected to the first and second substrate pieces;
and
an acceleration detection device extending along the direction perpendicular to the side-by-side direction and including an acceleration detector having a central portion that overlaps with the hinge in a plan view, a first fixed portion and a second fixed portion fixed to the first support surface and the second support surface respectively, and beams connected to the first and second fixed portions and supporting the acceleration detector,
wherein the central portion is separate from the hinge.

1 more element

Dependencies are inferred from the claim text.