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US 8,939,026 B2Granted
Frequency modulated micro gyro
OwnerYing W. Hsuinventor
Life of this patent
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Abstract
A sensing device comprises a rotationally oscillating proof mass resonator and a detector resonator. The detector resonator, actuated to produce an oscillating signal, is coupled to the proof mass resonator and the frequency of the oscillating signal is modulated by a change of motion of the proof mass resonator.
Claims4
A micro-machined device for sensing a motion comprising:
- a first resonator configured to be rotationally actuated,
- a second resonator configured to be actuated to produce an oscillating signal, and,
- means for coupling the first resonator to the second resonator whereby a frequency of the oscillating signal is modulated by a change of a motion of the first resonator.
A micro-machined device for sensing a force comprising:
- a first resonator configured to be rotationally actuated,
- a second resonator configured to be actuated to produce an oscillating signal, and,
- coupling means configured for connecting the first resonator to the second resonator, the coupling means configured for transferring a force produced by the first resonator into a change in a frequency of the oscillating signal.
A method for sensing a motion using a micro-machined device comprising the steps of:
- rotationally actuating a first resonator,
- actuating a second resonator to produce an oscillating signal,
- coupling the first resonator to the second resonator, and,
- modulating a frequency of the oscillating signal using a change of a motion of the first resonator.
1 more element
A method for sensing a force using a micro-machined device comprising the steps of:
- rotationally actuating a first resonator,
- actuating a second resonator to produce an oscillating signal,
- coupling the first resonator to the second resonator,
- transferring a force produced by the first resonator into a change in a frequency of the oscillating signal.
1 more element
Dependencies are inferred from the claim text.