Adaptive modifications in micro opto-electro-mechanical systems

A MOEMS device for measuring rate of rotation in which energy in the form of light is converted to electric current by photo sensors, which produce an output signal, the magnitude of the output signal of said photo sensors is manipulated by a time dependent light masking effect of a moving proof mass of a micro-opto-electromechanical rotation rate sensor (MOERRS) and the output signal can be adapted to correspond to a range of mechanical stimuli to which said MOERRS is sensitive, in order to accommodate the signal magnitude to the dynamic range available in the context of said MOERRS, said MOERRS comprising:

• the moving proof mass;
• an actuator for mechanically exciting said proof mass;
• an illumination source illuminating at least said proof mass;
• at least one array of photo-sensitive cells disposed on a VLSI, facing said proof mass, and wherein said VLSI includes circuitry for processing the output signal emanating from said MOERRS;
• and
• peripheral circuitry, disposed beside said MOERRS device;
• wherein said output signal emanating from said MOERRS is adaptable to facilitate exploitation of the dynamic range of said MOERRS device, by modifying properties of elements on board said MOERRS device, said modification including changing properties of at least one item selected from the group containing:
• amount of illumination impinging said photo sensitive cells, amplification of the signal emanating from said photo sensitive cells and the change of the force applied by an actuator exciting said proof mass.