Inertial sensor
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsWon Kyu Jeung, Ho Seop Jeong
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Abstract
Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110 on which a hole 200 penetrating in a thickness direction is formed, a mass body 120 disposed on a bottom of a central portion 113 of the membrane 110, and a post 130 disposed on a bottom of an edge 115 of the membrane 110 to support the membrane 110 and surrounding the mass body 120. By the configuration, the preferred embodiment of the present invention reduces damping force due to viscosity of air at the time of vibration by forming the hole 200 on the membrane 110 to increase displacement or amplitude of the mass body 120, thereby increasing sensitivity of the inertial sensor 100.
Claims10
An inertial sensor, comprising:
- a plate-shaped membrane on which a hole penetrating in a thickness direction is formed;
- a mass body that is disposed at the membrane;
- and
- a post that is disposed at the membrane to support the membrane;
- a driving unit disposed on the membrane,
- wherein a piezoelectric material, driving electrodes and sensing electrodes are disposed on one surface of the membrane,
- the piezoelectric material is partitioned into a first annular region surrounding a center of the membrane and a second annular region surrounding the first annular region,
- the driving electrodes divided into annular regions in an arc shape are formed in the second annular region,
- the sensing electrodes divided into annular regions in an arc shape are formed in the first annular region, and
- the hole is formed between at least two driving electrodes or at least two sensing electrodes.
An inertial sensor, comprising:
- a plate-shaped membrane on which a hole penetrating in a thickness direction is formed;
- a mass body that is disposed at the membrane;
- and
- a post that is disposed at the membrane to support the membrane,
- wherein a piezoelectric material, driving electrodes and sensing electrodes are disposed on one surface of the membrane,
- the piezoelectric material is partitioned into a first annular region surrounding a center of the membrane and a second annular region surrounding the first annular region,
- the sensing electrodes divided into annular regions in an arc shape are formed in the second annular region,
- the driving electrodes divided into annular regions in an arc shape are formed in the first annular region, and
- the hole is formed between at least two driving electrodes or at least two sensing electrodes.
Dependencies are inferred from the claim text.