Specimen observation method and device using secondary emission electron and mirror electron detection

A specimen observation device for observing a specimen using an electron beam, the specimen observation device comprising:

• a stage for placing the specimen thereon;
• a primary optical system for irradiating the specimen with an electron beam;
• a secondary optical system for detecting electrons to be observed which have been generated and have obtained information on the specimen by the electron beam irradiation;
• and
• an image processor for generating an image of the specimen from the detected electrons to be observed,
• wherein the primary optical system irradiates the specimen with the electron beam with a landing energy set in a transition region between a secondary emission electron region in which secondary emission electrons are detected and a mirror electron region in which mirror electrons are detected, thereby causing the secondary emission electrons and the mirror electrons to be mixed as the electrons to be observed, and
• wherein the secondary optical system detects the secondary emission electrons and the mirror electrons as the electrons to be observed, and
• wherein the landing energy is set such that foreign materials on the specimen and edge portions of the specimen generate the mirror electrons and the other portions of the specimen generate the secondary emission electrons, whereby contrast of the image of the specimen is increased.