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US 8,933,375 B2Granted
Susceptor heater and method of heating a substrate
AssigneeASM IP Holding B.V.
InventorsTodd Dunn, Fred Alokozai, Jerry Winkler, Michael Halpin
Life of this patent
Estimating the term…
Abstract
A wafer processing apparatus may include a susceptor having a top side and a backside, a susceptor heater having a spacing member and a heating member, a shim removably mounted between the susceptor and the susceptor heater, a cavity formed by the susceptor backside, the susceptor heater, and the shim, a fluid inlet communicating with the cavity, and a plurality of fluid outlets communicating with the cavity.
Claims26
A susceptor heater assembly comprising:
- a spacing member;
- a heating member having a top surface connected to the spacing member;
- a shim removably mounted on the heating member;
- a susceptor having a bottom surface, the susceptor connected to the shim;
- a fluid line inlet traversing the heating member;
- a fluid line in fluid communication with a cavity between the bottom surface and the top surface;
- a heat conductive fluid introduced through the fluid line inlet to provide heat transfer between the susceptor heater and the susceptor;
- and
- an outlet tube to direct the heat conductive fluid from the cavity.
6 more elements
A wafer processing apparatus comprising:
- a susceptor having a top side and a backside;
- a susceptor heater having a spacing member and a heating member;
- a shim removably mounted between the susceptor and the susceptor heater;
- a cavity formed by the susceptor backside, the susceptor heater, and the shim;
- a fluid inlet communicating with the cavity;
- and,
- a plurality of fluid outlets communicating with the cavity.
4 more elements
A method of heating a susceptor in a wafer processing chamber comprising the method of:
- providing a susceptor having a top side and a backside, a susceptor heater having a spacing member and a heating member, a shim removably mounted between the susceptor and the susceptor heater, a cavity formed by the susceptor backside, the susceptor heater, and the shim, a fluid inlet communicating with the cavity, and a plurality of fluid outlets communicating with the cavity;
- powering the heating element;
- and,
- flowing a heat conductive fluid through the fluid inlet, the cavity, and the plurality of fluid outlets.
1 more element
Dependencies are inferred from the claim text.