Back to results
US 8,921,028 B2Granted
Salt, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsSatoshi Yamaguchi, Koji Ichikawa
Life of this patent
Estimating the term…
Abstract
A salt represented by the formula (I) and a resist composition containing the salt are provided, wherein Q1, Q2, L1, ring W1, Re1, Re2, Re3, Re4, Re5, Re6, Re7, Re8, Re9, Re10, Re11, Re12, Re13 and Z are defined in the specification.
Claims9
A salt represented by the formula (I)
- wherein Q1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group;
- L1 represents *—CO—O-La- or *—CH2—O-Lb-, * represents a bond to —CQ1Q2, La and Lb independently represent a C1 to C15 divalent saturated aliphatic hydrocarbon group, and one or more —CH2— contained in the divalent saturated aliphatic hydrocarbon group may be replaced by —O— or —CO—;
- ring W1 represents a C2 to C36 non-aromatic heterocyclic ring, and one or more —CH2-contained in the heterocyclic ring may be replaced by —O—;
- Re1, Re2, Re3, Re4, Re5, Re6, Re7, Re8, Re9, Re10, Re11, Re12 and Re13 independently represent a hydrogen atom, a halogen atom, a hydroxy group, a C1 to C12 hydrocarbon group or carboxyl group, or two of Re1, Re2, Re3, Re4, Re5, Re6, Re7, Re8, Re9, Re10, Re11, Re12 and Re13, which two respectively bond to adjacent carbon atoms, may form a ring together with two carbon atoms bonded thereto, and one or more —CH2— contained in the hydrocarbon group may be replaced by —O— or —CO—;
- Z represents a single bond or a divalent linking group.
2 more elements
Dependencies are inferred from the claim text.