# US 8,918,198 B2 · Methods and systems for control of a surface modification process

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- Number: US 8,918,198 B2
- Document ID: US8918198B2
- Status: Granted
- Kind: B2
- Application number: 13/144,667
- Filed: 2010-01-20
- Published: 2011-11-10
- Granted: 2014-12-23
- Earliest claimed: 2009-01-21
- Applicants: George Atanasoff
- Inventors: George Atanasoff
- Web page: https://patentgrep.com/patent/US8918198B2

## CPC

- G05B 19/4097: characterised by using design data to control NC machines, e.g. CAD/CAM (G05B19/4093 takes precedence)
- A61P 31/04: Antibacterial agents
- G01B 11/0625: {with measurement of absorption or reflection}
- G01B 11/0683: {measurement during deposition or removal of the layer}
- G05B 13/048: {using a predictor}
- H10F 71/00: Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00)
- H10F 71/10: the devices comprising amorphous semiconductor material
- H10F 71/107: {Continuous treatment of the devices, e.g. roll-to roll processes or multi-chamber deposition}
- H10F 77/126: {comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]}
- G05B 2219/35028: Adapt design as function of manufacturing merits, features, for manufacturing, DFM
- G05B 2219/35081: Product design and process machining planning concurrently, machining as function of design
- Y02E 10/541: CuInSe2 material PV cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)
- A61P: SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

A method and system for modifying a substrate, such a thin film, solar panel or the like detects error and/or variance and, if needed, re-optimizes the product design and/or process parameters on the fly, so that product can meet the product specification. This allows for methods and systems of process control that can adaptively change the product design in real time.

## Claims

### Claim 1

A computer-assisted method of making a product having a predetermined product specification and an initial product design which defines at least a partial structure of the product, the method comprising:
(a) modifying a surface of a substrate to form an intermediate product;
(b) measuring in real time, at least one measured parameter of said intermediate product;
(c) comparing in real time, said at least one measured parameter with at least one target parameter;
(d) in response to the result of the comparing step, employing a revised product design that is in accordance with the product specification;
(e) continuing manufacture of the product based on the revised product design; and
(f) repeating steps (a)-(e) until said predetermined product specification is reached;
wherein steps (b)-(d) transpire as said surface continues to be modified and the product's product design is revised during the course of manufacture.

### Claim 2 (depends on 1)

The method according to claim 1, comprising:
calculating one or more secondary parameters from the at least one measured parameter.

### Claim 3 (depends on 2)

The method according to claim 2, comprising:
calculating a bandgap of the intermediate product.

### Claim 4 (depends on 2)

The method according to claim 2, comprising:
calculating a surface roughness of the intermediate product.

### Claim 5 (depends on 1)

The method according to claim 1, comprising storing information about:
a) the process parameters during the modification process;
b) the equipment conditions during the modification process; and
c) the surrounding environment condition during the modification process.

### Claim 6 (depends on 5)

The method according to claim 5, comprising:
calculating a product model based at least in part on the stored information and the at least one measured parameter.

### Claim 7 (depends on 1)

The method according to claim 1, comprising:
a) searching a database comprising product models during the modification process; and
b) selecting a product model in response to said at least one measured parameter.

### Claim 8 (depends on 1)

The method according to claim 1, wherein steps (b)-(e) are performed without disruption of the manufacturing process.

### Claim 9 (depends on 1)

The method according to claim 1, wherein:
said at least one measured parameter is an measured optical parameter; and
said at least one target parameter is a target optical parameter.

### Claim 10 (depends on 9)

The method according to claim 9, wherein:
said at least one measured optical parameter is optical scattering.

### Claim 11 (depends on 10)

The method according to claim 10, wherein:
said at least one measured optical parameter is near field optical scattering.

### Claim 12 (depends on 9)

The method according to claim 9, comprising:
determining one or more of an angular range and an angular distribution of the measured optical parameter.

### Claim 13 (depends on 9)

The method according to claim 9, comprising:
determining one or more polarization components of the measured optical parameter.

### Claim 14 (depends on 1)

The method according to claim 1, wherein:
said at least one measured parameter is a uniformity measure of a physical parameter determined over a predetermined area of the specimen.

### Claim 15 (depends on 1)

The method according to claim 1, wherein:
said at least one measured parameter is a homogeneity measure of a physical parameter.

### Claim 16 (depends on 1)

The method according to claim 1, comprising:
taking a plurality of measurements in different chambers of a cluster tool during the course of making said product; or
taking a plurality of measurements in different compartments of a chamber during the course of making said product, or
both.

### Claim 17 (depends on 1)

The method according to claim 1, comprising:
measuring said at least one parameter at one or more fixed wavelengths.

### Claim 18 (depends on 1)

The method according to claim 1, comprising:
measuring said at least one parameter in one or more predetermined continuous spectral ranges.

### Claim 19 (depends on 1)

The method according to claim 1, comprising:
measuring said at least one parameter simultaneously at fixed wavelengths and within predetermined spectral ranges; and
comparing the measured values with their target values both at said fixed wavelengths and said predetermined spectral ranges.

### Claim 20 (depends on 1)

The method according to claim 1, comprising
taking a plurality of different measured parameters of said intermediate product; and
comparing said plurality of different measured parameters with a corresponding plurality of target parameters, before revising said initial product design.

### Claim 21 (depends on 1)

The method according to claim 1, comprising:
if a current value of said at least one measured parameter is sufficiently close to a previous value for the same at least one measured parameter, using a previously revised initial product design, instead of revising the initial product design based on current results of the comparing step.

### Claim 22 (depends on 1)

The method according to claim 1, further comprising:
performing one or more of iterative prediction and iterative calculation; and
verifying and validating the resulting prediction and/or calculation.

### Claim 23 (depends on 1)

The method according to claim 1, further comprising:
monitoring at least one finite band of wavelengths to form a measured spectral scan; and
monitoring at least one reference wavelength to form said at least one measured parameter, wherein:
said at least one measured parameter comprises at least one measured optical parameter.

### Claim 24 (depends on 23)

The method according to claim 23, comprising:
based at least in part on said at least one measured optical parameter, forming a predicted spectral scan on the assumption that a particular physical property has changed;
comparing the predicted spectral scan with the measured spectral scan to form at least one spectral difference metric;
based at least in part on said at least one spectral difference metric, verifying that said physical property has changed.

### Claim 25 (depends on 1)

The method according to claim 1, wherein the at least one measured parameter is one from the group consisting of:
transmission of one or more specified wavelengths, reflection of one or more specified wavelengths, thickness, deposition rate, polarization, refractive index, absorption, scattering, photo-luminescence, an electro-optical parameter, an acousto-optical parameter and a thermo-optical parameter.

### Claim 26

A processing system configured to make a product having a predetermined product specification and an initial product design which defines at least a partial structure of the product, the processing system comprising:
(a) at least one processing apparatus configured to accommodate a substrate having a surface to be modified in order to form an intermediate product;
(b) at least one detector for measuring, in real time, at least one measured parameter of said intermediate product; and
(c) one or more computers programmed to:
(c1) compare, in real time, said at least one measured parameter with at least one target parameter derived from the initial product design;
(c2) create a revised product design that is in accordance with the product specification, based at least in part on the result of comparing the at least one measured parameter with the at least one target parameter derived from the initial product design;
(c3) store information reflective of the revised product design; and
(c4) control the processing chamber so that it continues manufacture the product based on the revised product design,
while a surface of said intermediate product continues to be modified; and
wherein the product's product design is revised during the course of manufacture.

### Claim 27 (depends on 26)

The processing system according to claim 26, wherein:
the one or more computers are further programmed to decide, based on the outcome of comparing in real time, whether to:
(d1) continue the process to an end point;
(d2) re-optimize the design model and/or modify the process recipe, or
(d3) reject the intermediate product.

### Claim 28 (depends on 26)

The processing system according to claim 26, wherein:
the detector comprises an optical device.

### Claim 29 (depends on 28)

The processing system according to claim 28, wherein:
the detector comprises a fiber optics device.

### Claim 30 (depends on 29)

The processing system according to claim 29, wherein the fiber optics device comprises:
a) single mode optical fibers and components; and also
b) multimode optical fibers and components.

### Claim 31 (depends on 30)

The processing system according to claim 30, wherein:
the single mode and multimode optical fibers and components are positioned at different distances and angles, relative to a measured surface of the intermediate product.

### Claim 32 (depends on 30)

The processing system according to claim 30, wherein:
a plurality of illumination fibers are included among the single mode optical fibers and multimode optical fibers; and
the illumination fibers are positioned to transmit light at different distances and angles of incidence, relative to a measured surface of the intermediate product.

### Claim 33 (depends on 26)

The processing system according to claim 26, wherein:
the detector is configured to measure the at least one measured parameter from the back side of the intermediate product.

### Claim 34 (depends on 26)

The processing system according to claim 26, wherein:
a plurality of detectors are provided; and
the plurality of detectors are positioned to monitor different areas of a single intermediate product.

### Claim 35 (depends on 26)

The processing system according to claim 26, wherein:
a plurality of detectors are provided; and
the plurality of detectors are positioned to monitor different intermediate product.

### Claim 36 (depends on 26)

The processing system according to claim 26, wherein:
a plurality of detectors are provided; and
the plurality of detectors are positioned to monitor different stages of modification of the same intermediate product.

### Claim 37 (depends on 26)

The processing system according to claim 26, wherein:
a plurality of detectors are provided; and
the plurality of detectors are positioned at close proximity to a surface of the intermediate product to detect scattered light from the intermediate product.

### Claim 38 (depends on 1)

The method according to claim 1, comprising making at least one of: a solar cell, a flat screen monitor, a semiconductor, an optical thin film, a nanostructured 2D or 3D device, and a printed product.

### Claim 39 (depends on 6)

The method according to claim 6, wherein the product model comprises:
a detailed product description including its design and structure.

### Claim 40 (depends on 39)

The method according to claim 39, wherein the product model comprises at least one or more of:
a mathematical relationship;
a data collection in numerical form; and
a data collection in graphical form.

### Claim 41 (depends on 40)

The method according to claim 40, wherein the product model comprises:
a graphical representation of a mathematical relationship.

### Claim 42 (depends on 14)

The method according to claim 14 wherein:
the physical parameter whose uniformity is measured, is a thickness of the intermediate product.

### Claim 43 (depends on 15)

The method according to claim 15 wherein:
the physical parameter whose homogeneity is measured, is a chemical composition of the intermediate product.

### Claim 44 (depends on 25)

The method according to claim 25, comprising:
measuring at least one of a transmission and a reflection at one or more wavelengths; and
determining a drift in a spectral peak of said transmission and/or reflection.