Nanoimprint lithography formation of functional nanoparticles using dual release layers

An imprint lithography method for forming nanoparticles comprising:

• forming a multilayer substrate comprising a base layer, a first removable layer bonded to the base layer, one or more functional layers bonded to the first removable layer;
• and a second removable layer bonded to one of the functional layers, wherein at least one of the one or more functional layers contains a functional material;
• forming a patterned layer on a surface of the multilayer substrate in an imprint lithography process, the patterned layer comprising a multiplicity of projections and recessions;
• transferring the features of the patterned layer into the multilayer substrate in one or more etching processes to form a plurality of multilayer pillars extending from the base layer;
• dissolving the first and second removable layers with a solvent to separate pillars containing the one or more functional layers from the base layer, the separated pillars defining nanoparticles.