Image processing method for mass spectrum image, program, and apparatus
AssigneeCanon Kabushiki Kaisha
InventorTakeo Suga
Life of this patent
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Abstract
Image blurring of a mass spectrum image obtained by the signal intensity for each mass/charge ratio from the obtained two-dimensional mass spectrum is reduced by image restoration using a blurring function. The blurring function expresses a two dimensional distribution of transferred energy related to the distance from a point of primary ion incidence limited by a region exceeding desorption energy of a molecule.
Claims14
An image processing method for a mass spectrum image of secondary ion mass spectrometry, the method comprising using a computer to perform the steps of:
- expressing transferred energy as a radial function related to a distance from a point of primary ion incidence;
- expressing the radial function in a region exceeding desorption energy of a molecule as a 2D distribution function;
- using the 2D distribution function as a blurring function;
- and
- using the blurring function to reduce image blurring of the mass spectrum image.
A computer-readable medium storing a program for causing a computer to execute:
- a first step of inputting data representing an ionic species of a primary ion, an electric charge, an accelerating voltage, and a substrate type;
- a second step of executing Monte Carlo simulation based on a parameter inputted in the first step;
- a third step of generating a table representing a relationship between a distance from a point of primary ion incidence and transferred energy from a result obtained in the second step;
- a fourth step of specifying a preset function;
- a fifth step of fitting the distance and the transferred energy obtained in the third step by the function specified in the fourth step;
- a sixth step of cutting off a function fitted by energy lower than desorption energy of a molecule;
- a seventh step of cutting off a function fitted by energy higher than bond dissociation energy of the sample molecule;
- an eighth step of converting the fitted function obtained in the fifth step to a 2D distribution function;
- a ninth step of storing the 2D distribution function obtained in the eighth step as a blurring function;
- a tenth step of obtaining a mass spectrum at each coordinate;
- an eleventh step of specifying m/z in a specific range;
- a twelfth step of extracting a specified intensity of m/z from the mass spectrum at each coordinate and storing the intensity as a mass spectrum image;
- a thirteenth step of performing image restoration on the blurring function stored in the ninth step and the mass spectrum image stored in the twelfth step;
- a fourteenth step of storing the restored image obtained in the thirteenth step;
- and
- a fifteenth step of displaying the restored image stored in the fourteenth step.
An image processing method for a mass spectrum image of secondary ion mass spectrometry, the method comprising using a computer to perform the steps of:
- obtaining transferred energy as a radial function related to a distance from a point of primary ion incidence;
- obtaining the radial function in a region exceeding desorption energy of a molecule as a 2D distribution function;
- using the 2D distribution function as a blurring function;
- and
- using the blurring function to reduce image blurring of the mass spectrum image.
An image processing method for a mass spectrum image of secondary ion mass spectrometry, the method comprising using a computer to perform the steps of:
- reducing image blurring of the mass spectrum image using a blurring function as a 2D distribution function, wherein the blurring function is obtained by obtaining transferred energy as a radial function related to a distance from a point of primary ion incidence, and wherein the radial function is obtained in a region exceeding desorption energy of a molecule as the 2D distribution function.
Dependencies are inferred from the claim text.