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US 8,913,766 B2Granted
Acoustic transducers with perforated membranes
AssigneeNXP B.V.
InventorsIris Bominaar-Silkens, Andres Felipe Vasquez Quintero, Klaus Reimann, Twan Van Lippen, Remco Henricus Wilhelmus Pijnenburg
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Abstract
A MEMS device, such as a microphone, uses a fixed perforated plate. The fixed plate comprises an array of holes across the plate area. At least a set of the holes adjacent the outer periphery comprises a plurality of rows of elongate holes, the rows at different distances from the periphery. This design improves the mechanical robustness of the membrane and can additionally allow tuning of the mechanical behavior of the plate.
Claims19
A MEMS device comprising:
- a fixed membrane;
- and
- a movable membrane separated by a gap,
- wherein movement of the movable membrane is sensed or controlled to provide operation of the device,
- wherein the fixed membrane comprises an array of holes including a set of holes which are provided adjacent an outer periphery of the fixed membrane, the set of holes including a plurality of rows of elongate holes, the rows at different distances from the periphery, wherein each hole has a hole shape defined by a first direction and axis and by a second direction and axis perpendicular to the first direction, the hole shape being generally symmetrical about each axis, and
- wherein an average stress of the fixed and movable membrane are selected such that a resonance frequency of the fixed and movable membranes are the same.
3 more elements
A MEMS device comprising:
- a fixed membrane;
- and
- a movable membrane separated by a gap,
- wherein movement of the movable membrane is sensed or controlled to provide operation of the device,
- wherein the fixed membrane comprises an array of holes including a set of holes which are provided adjacent an outer periphery of the fixed membrane, the set of holes including a plurality of rows of elongate holes, the rows at different distances from the periphery, wherein each hole has a hole shape defined by a first direction and axis and by a second direction and axis perpendicular to the first direction, the hole shape being generally symmetrical about each axis, and
- wherein the fixed membrane and the movable membrane are circular, and each row of holes of the set comprises a circle at a fixed radius.
3 more elements
A MEMS device comprising:
- a fixed membrane;
- and
- a movable membrane separated by a gap,
- wherein movement of the movable membrane is sensed or controlled to provide operation of the device,
- wherein the fixed membrane comprises an array of holes including a set of holes which are provided adjacent an outer periphery of the fixed membrane, the set of holes including a plurality of rows of elongate holes, the rows at different distances from the periphery, and
- wherein within said set of holes, each said row has longer holes than the adjacent said row on the radial inner side, such that the hole length is proportional to the radial distance from the centre.
3 more elements
A MEMS device comprising:
- a fixed membrane;
- and
- a movable membrane separated by a gap,
- wherein movement of the movable membrane is sensed or controlled to provide operation of the device, and
- wherein the fixed membrane comprises an array of holes including a set of holes which are provided adjacent an outer periphery of the fixed membrane, the set of holes including a plurality of rows of elongate holes, the rows at different distances from the periphery, wherein each hole has a hole shape defined by a first direction and axis and by a second direction and axis perpendicular to the first direction, the hole shape being generally symmetrical about each axis, and being defined in two dimensions wholly by a continuous concave portion of the fixed membrane.
2 more elements
Dependencies are inferred from the claim text.