Optical system for illuminating a measured object and interferometric system for measuring surfaces of a measured object
AssigneeRobert Bosch GmbH
InventorsMatthias Fleischer, Pawel Drabarek
Life of this patent
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Abstract
An interferometric system for measuring surfaces of a measured object using an optical system. The optical system has a beam splitter, which directs measuring beams in a first beam path and measuring beams in a second beam path onto the surfaces of the measured object with the aid of two mirrors. The beam paths which are formed by the light beams which are reflected on the surfaces at least partially overlap in an area having identical beam direction. In this manner, measured surfaces of the measured object are at least partially imaged on an identically irradiated surface of a detector, such as an image recorder.
Claims19
An optical system for illuminating at least one surface of a measured object, comprising:
- a beam-generating light source to introduce light beams;
- a first optical element;
- a second optical element, wherein the first optical element is for forming at least one first beam path and at least one second beam path, which are situated so that light beams in the at least one first beam path are directed by the second optical element, which is downstream from the first optical element, perpendicularly onto a first object surface;
- and
- a third optical element, wherein light beams in the at least one second beam path are directed by the third optical element, which is downstream from the first optical element, onto a second object surface, wherein the at least one first beam path of the light beams which are reflected on the first object surface and the at least one second beam path of the light beams which are reflected on the second object surface at least partially overlap in an area having beam directions which are oriented parallel to one another;
- wherein a total path difference of both optical path lengths is greater than a coherence length of the light source such that the beams reflected from the first object surface and the second object surface are prevented from interfering with each other.
An interferometric system for measuring surfaces of a measured object, comprising:
- an interferometer measuring head;
- and
- an optical system for illuminating at least one surface of a measured object, including:
- a radiation-generating light source;
- an illumination optics for forming an illumination beam path;
- a reference element;
- a beam splitter for dividing the light beams emitted by the light source into partial light beams, wherein the partial light beams are at least used as the measuring beams in a measuring beam path for illuminating a measured object and at least as reference beams, which are directed onto the reference element;
- an objective for forming an imaging beam path of the measuring beams, which are reflected from the measured object;
- and
- a detector for imaging the interference pattern from the superposition of the measuring beams, which are reflected from the measured object, wherein the reference beams are included;
- wherein the optical system for illuminating the at least one surface of a measured object is situated in the measuring beam path of the interferometer measuring head;
- wherein a total path difference of both optical pathlengths is greater than a coherence length of the light source such that the beams reflected from a first object surface and a second object surface are prevented from interfering with each other.
Dependencies are inferred from the claim text.