Internal RF antenna with dielectric insulation
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsWilhelm P. Platow, Craig R. Chaney
Life of this patent
Estimating the term…
Abstract
Disclosed is a radio frequency (RF) antenna for plasma ion sources. The RF antenna includes a low-resistance metal tube having an inner and outer diameter. A low friction polymer tube also having an inner and outer diameter surrounds the low-resistance metal tube. The inner diameter of the polymer tube is slightly larger than the outer diameter of the low-resistance metal tube. A pre-formed quartz glass tube encases the low friction polymer tube and low-resistance metal tube. The quartz glass tube is pre-formed in a desired shape. A guide wire is attached inside one end of the low-resistance hollow metal tube. The flexible low friction polymer tube containing the low-resistance metal tubed may then be threaded through the quartz glass tube.
Claims18
A radio frequency (RF) antenna comprising:
- a low-resistance metal tube having an inner and outer diameter;
- a low friction polymer tube having an inner and outer diameter surrounding the low-resistance metal tube, the inner diameter of the polymer tube being larger than the outer diameter of the low-resistance metal tube;
- and
- a pre-formed quartz glass tube containing the low friction polymer tube and low-resistance metal tube.
A method of forming a radio frequency (RF) antenna comprising:
- inserting a low-resistance hollow metal tube into a flexible low friction polymer tube, the inner diameter of the polymer tube being slightly larger than the outer diameter of the low-resistance metal tube;
- attaching a guide wire inside one end of the low-resistance hollow metal tube;
- and threading the flexible low friction polymer tube containing the low-resistance metal tube through a pre-formed quartz glass tube.
An ion source comprising:
- an ion source chamber;
- a radio frequency (RF) antenna disposed within the ion source chamber, the RF antenna comprising:
- a low-resistance metal tube having an inner and outer diameter and a first and second end;
- a low friction polymer tube having an inner and outer diameter surrounding the low-resistance metal tube, the inner diameter of the polymer tube being slightly larger than the outer diameter of the low-resistance metal tube;
- and
- a pre-formed quartz glass tube housing the low friction polymer tube and low-resistance metal tube;
- a coolant reservoir outside the ion source chamber coupled with each of the first and second ends of the low-resistance metal tube to create a closed circulation path;
- and
- a power source outside the ion source chamber coupled with the low-resistance metal tube.
Dependencies are inferred from the claim text.