Back to results
US 8,912,671 B2Granted
Semiconductor device having alignment mark
AssigneesHimax Technologies Limited, Himax Semiconductor, Inc.
InventorsPo-Yang Tsai, Chan-Liang Wu
Life of this patent
Estimating the term…
Abstract
A semiconductor device including a substrate and at least one alignment mark disposed on the substrate and having at least one hollow pattern. Therefore, the identification rate of the alignment mark can be high by the hollow pattern.
Claims13
A semiconductor device, comprising:
- a substrate;
- and
- at least one alignment mark disposed on the substrate and having at least one hollow pattern, wherein the at least one hollow pattern comprises a plurality of sub hollow patterns, and the sub hollow patterns are substantially the same.
Dependencies are inferred from the claim text.