US 8,912,660 B2 · ESD protection device

Abstract

An ESD protection device includes a semiconductor substrate including input/output electrodes and a rewiring layer located on the top surface of the semiconductor substrate. An ESD protection circuit is provided in the top layer of the semiconductor substrate, and the input/output electrodes are connected to the ESD protection circuit. The rewiring layer includes interlayer wiring lines, in-plane wiring lines, and post-shaped electrodes. First ends of the interlayer wiring lines provided in the thickness direction are connected to the input/output electrodes provided on the top surface of the semiconductor substrate and the second ends are connected to first ends of the in-plane wiring lines extending in the plane direction. The distance between the centers of the first and second post-shaped electrodes is larger than the distance between the centers of the first and second input/output electrodes.

Claims20

Dependent claims

An ESD protection device comprising:

a semiconductor substrate including an ESD protection circuit and first and second input/output electrodes electrically connected to the ESD protection circuit;
and
a rewiring layer including a first post-shaped electrode electrically connected to the first input/output electrode and a first terminal electrode, and a second post-shaped electrode electrically connected to the second input/output electrode and a second terminal electrode;
wherein
a distance between centers of the first and second post-shaped electrodes is larger than a distance between centers of the first and second input/output electrodes.

2 more elements

Dependencies are inferred from the claim text.

ESD protection device

Life of this patent

ESD protection device

Life of this patent

Abstract

Claims20